Moving and Installing Equipment in Cleanrooms: Key Factors | IES

Moving and installing high-technology equipment is always a challenging task, but when you add a cleanroom environment to the mix, things get even more complex. Cleanrooms are designed to maintain exceptionally controlled environments to protect sensitive processes, requiring a unique set of practices to ensure equipment is moved and installed without compromising the cleanroom's integrity or the functionality of your tools.

In this article, we will outline key considerations for moving and installing equipment in cleanroom environments, from adhering to stringent cleanliness requirements to precise calibration and testing for sensitive tools like semiconductor ion implanters.

1. Adhering to Stringent Cleanliness Requirements

Cleanrooms operate under strict standards, such as the ISO 14644-1, which classifies them based on the number of allowable particles in the air. Exceeding these limits can severely affect product quality, disrupt processes, and even damage equipment. Therefore, maintaining cleanliness is critical when moving and installing equipment.

The very act of moving equipment generates particles—friction between surfaces, vibrations, and human activity can release contaminants into the environment. Bringing external equipment into the cleanroom adds another layer of risk if that equipment isn’t properly decontaminated.

To mitigate these risks:

• Pre-clean equipment before it enters the cleanroom.
• Use cleanroom-approved materials that don’t shed particles.
• Coordinate with cleanroom experts and technicians to develop strategies for minimising contamination, such as using protective barriers, air showers, and cleanroom-compatible tools.

Every cleanroom has different cleanliness standards depending on its classification, so all personnel must be aware of the specific requirements of the cleanroom they’re working in.

2. Environmental Control: Maintaining Optimal Conditions

Maintaining a stable environment is critical for cleanrooms. This involves controlling particles, temperature, humidity, and air pressure to ensure that sensitive tools, such as ion implanters, operate within their required specifications.

Small changes in temperature can cause materials to expand or contract, affecting product quality or causing equipment malfunctions. Similarly, fluctuations in pressure can allow contaminants from lower-grade areas to infiltrate the cleanroom.

To ensure environmental control:

• Use airlocks and pass-through chambers to regulate pressure when bringing equipment into the cleanroom.
• Monitor environmental conditions like temperature, pressure, and humidity before, during, and after the move. You may need to adjust HVAC systems accordingly.
• Plan equipment placement to avoid disrupting airflow, which can spread particles and compromise the cleanroom’s integrity.

Collaborating with a team experienced in cleanroom operations and environmental control can significantly reduce the risk of disruption and ensure your equipment functions correctly.

3. Meticulous Planning: The Key to a Successful Move

Every successful cleanroom move begins with meticulous planning. This involves understanding both the intricacies of the equipment and the cleanroom environment.

The planning phase should include:

• Detailed equipment assessment: Know the dimensions, weight, and other critical details of the equipment being moved. Assess how it can be maneuvered without compromising cleanliness and ensure that it fits through doorways, corridors, and lifts.
• Pathways and access routes: Plan your route carefully, taking into account any obstacles along the way. Determine whether you’ll need to dismantle the equipment and how to reassemble it within the cleanroom while maintaining cleanliness.
• Risk assessments: Identify potential sources of contamination and devise strategies to mitigate them. This could involve additional containment measures, protective barriers, or optimised movement paths to minimise friction.
• Decontamination protocols: Consider whether pre-installation decontamination is required and plan post-installation cleaning to address any contamination introduced during the move.

With a detailed plan in place, you can anticipate and overcome challenges, ensuring that the equipment move is both smooth and safe.

4. Handling Technical Challenges in Cleanroom Environments

Cleanroom environments present unique technical challenges that go beyond standard equipment moves. Engineers and technicians must navigate restricted entry points, ensure precise alignment, and use specialised tools—all while adhering to strict cleanliness protocols.

Some technical challenges you may encounter include:

• Restricted entry and exit points: Cleanrooms are often designed with limited access points, making it difficult to maneuver large or bulky equipment. Engineers must carefully plan how to get the equipment into the cleanroom without compromising the environment.
• Precision alignment: Equipment within cleanrooms often requires sub-millimeter accuracy. Achieving this level of precision is critical to ensuring that the equipment operates correctly and does not disrupt the cleanroom’s controlled conditions.
• Specialised tools: Tools used in cleanrooms must be compatible with cleanroom standards. This may mean using tools made from non-shedding materials or tools that are specifically designed to minimise contamination.

Overcoming these challenges requires a team of highly skilled engineers and technicians who have experience working in cleanroom environments. They should be familiar with the specific requirements of the cleanroom and the equipment being installed.

5. The Importance of Calibration and Testing

For complex tools like semiconductor ion implanters, calibration and testing are essential components of the installation process. Proper calibration ensures that the equipment functions within specified tolerances, while thorough testing verifies that it meets performance standards.

The calibration and testing process includes:

• Calibration protocols: Fine-tune the equipment to ensure it performs accurately across its entire range of operating conditions.
• Testing against specifications: Verify the equipment’s response to different energy levels, ion types, and dose settings to ensure consistent performance.
• Wafer uniformity testing: This involves implanting a set of wafers with known parameters and measuring the results to ensure uniformity across the batch.
• Energy spread analysis: Measure the uniformity of ion energy across the wafer to control implantation depth and maintain quality.
• Contamination checks: Inspect the ion source, beamline, and other critical components for cleanliness to prevent contamination during implantation.
• Vacuum system calibration: Verify and calibrate the vacuum system to ensure it meets the required specifications, which is essential for maintaining proper conditions within the implanter.
• Trajectory calibration: Align and calibrate the ion beam’s trajectory to ensure that ions follow the intended path during implantation.

Calibration and testing are critical to ensuring that your equipment performs as expected in the cleanroom environment, maintaining both the integrity of the process and the quality of the final product.

6. Equipping Your Team with the Right Skills and Safety Training

Moving and installing equipment in cleanrooms presents safety risks that go beyond standard working conditions. Cleanroom environments require specialised garments, such as suits, hoods, gloves, and shoe covers, to prevent contamination. However, these garments can also limit range of motion and peripheral vision, increasing the risk of accidents when moving large, heavy equipment.

That’s why safety training is crucial. Every worker involved in the move must be equipped with the knowledge and skills to operate safely within the cleanroom. Training should cover:

• Cleanroom classifications and requirements: Ensure workers understand the specific cleanliness requirements of the cleanroom they are working in.
• Safety protocols: Provide guidelines for navigating confined spaces and working with specialised equipment.
• Emergency response: Train workers on emergency exits, evacuation procedures, and protocols for dealing with equipment malfunctions or other unforeseen incidents.
• Gowning and de-gowning procedures: Proper gowning and de-gowning are essential for maintaining cleanliness and preventing contamination.

Comprehensive training ensures that your team is well-prepared to move and install equipment in cleanrooms without compromising safety or cleanliness.

7. Collaborating with Cleanroom and Equipment Experts

Given the complexities of moving and installing equipment in cleanroom environments, collaboration with cleanroom and equipment experts is vital. These experts can provide guidance on how to maintain environmental control, adhere to cleanliness standards, and ensure that your equipment is calibrated and tested correctly.

At IES, we’ve been helping companies move and install complex equipment in cleanrooms since 1991. Our team has the experience and expertise to handle the most challenging cleanroom installations, from semiconductor ion implanters to other high-technology tools.

Move and Install Cleanroom Equipment with Confidence

Moving and installing complex equipment in cleanroom environments demands a meticulous approach to cleanliness, environmental control, planning, and safety. Whether you're working with semiconductor ion implanters or other high-technology tools, partnering with experts who understand the nuances of cleanroom standards and equipment installation is critical.

At IES, we’ve been helping semiconductor organisations move and install complex equipment since 1991. Our experienced team ensures that every aspect of the move, from planning to calibration, is handled with the utmost precision.

Ready to discuss your next project? Get in touch.