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PMMA Resist

Description: 

PMMA (Poly Methyl Methacrylate) is a widely used , versatile, positive tone resist used in both e-beam and UV lithography for many microelectronic applications. PMMA in Anisole can be supplied in various dilutions from 2% to 9% solids to meet customer requirements. 

All products are available in volumes from 250mL up to 30L and other dilutions can be purchased on request. 

PMMA can be purchased via a “Flexible Distribution Scheme”. For example, if you purchase 2L of PMMA, you get the high volume discount, however the resist can be supplied in 250mL or 500mL bottles as you require the resist if preferred. This reduces any potential storage or shelf life issues or users contaminating larger volume bottles accidentally. In addition the resist dilutions can be varied. 

Applications:

Multiple e-beam applications including lower A/R applications in:

  • Nanoelectronics

  • Photonics

  • Microfluidics MEMS

  • NEMS Zone Plates

  • Wave guides

Multiple UV Applications

  • Power Devices

  • Microprocessor / Logic

  • Mixed Signal

  • MEMS