scia Systems

Chemnitz, Germany

scia Systems designs ion beam and plasma process systems for nanometer-precise surface processing. The company’s products are typically used in the high volume production, and research and development, of MEMS, microelectronics and precision optical components. Among the key applications of scia Systems products are thickness trimming and frequency in BAW / SAW device manufacturing, and multilayer optic coating for extreme ultraviolet lithography.

scia Systems is recognised for the high reliability of its flexible tools, and the provision of excellent technical support. A range of vacuum chamber processes can be selected by the customer for scia Systems’ in-line or cluster solutions.